Edwards Evaporator

Description

The Thermal evaporator uses thermal heat to heat up a solid target source in a boat such as tungsten boat to its melting temperature, causing atoms to evaporate from the target to coat substrate in the vacuum chamber. Edwards E306 evaporator has a base pressure of 2×10-6mBar pumped with dry rough pump and turbo pump. It has three boats and is mainly used for ohmic contact with material of Au/Ge/Ni alloy.