Plasma etcher : In low pressure plasma systems, plasma is generated in an evacuated chamber containing small amounts of the desired precursor gas. Three-dimensional parts that have gaps and hollows are easily treated while they are submersed in the plasma chamber which allows for an all-over treatment of goods. http://www.thierry-corp.com/Low-Pressure-Plasma-Sys.371.0.html
| Dr Christopher Muryn | |
| christopher.a.muryn@manchester.ac.uk | |
| +44-161-275-1418 |
| Mr Roger Speak | |
| roger.speak@manchester.ac.uk |