Mask aligner (MAN-E-A2D-5b)

The University of Manchester

Description

Precision alignment of tools for surface functionalisation

ManufacturerSUSS MICROTEC LITHOGRAPHY GMBH

Model

Location

Main Campus

FSE Research Institutes

Contact

Academic Contact

	Professor Nigel Scrutton
	Nigel.Scrutton@manchester.ac.uk
	+44-161-306-5152

Technical Contact

	Dr Rosalind Le feuvre
	r.a.le-feuvre@manchester.ac.uk
	+44-161-306-5184