Surface profiler is a tool that provides 2D high accurate measurement on semiconductor substrate by scanning a sharp diamond tipped stylus with 5 microns in radius across substrate surface. Topography information such as thin step heights and surface micro roughness can be determined. The Alpha Step Surface Profiler can measure height of 400 microns with a 5 nm accuracy and maximum scan length of 10 mm.
|Prof Prof Edmund Linfield|
|Dr Dr Li Chen|