The Escalab has a high intensity monochromated Al Kα source which can be focussed to a spot 120-600 μm in diameter on the sample. This allows for high resolution XPS with a high signal to noise ratio. XPS chemical maps of a sample with a 25 μm resolution can also be obtained. The instrument also has a high intensity UV source for Ultraviolet photoelectron Spectroscopy (UPS), and a FEGSEM for SEM imaging and Scanning Auger Microscopy. A focussed argon ion miller can be used to etch the sample in order to perform depth profiling XPS experiments.
ManufacturerTHERMO VG SCIENTIFIC