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Plasma Enhanced Atomic Layer Deposition System
Description
This system produces thin film layers with atomic precision. These are usually insulating layers in transistor stacks where the surface must be very smooth. Facility: Yes
ManufacturerPICOSUN
Model
Location
Main Campus
Contact
Academic Contact
| Professor Sir Konstantin Novoselov | |
| Konstantin.Novoselov@manchester.ac.uk | |
| +44-161-275-4119 |
Technical Contact
| Professor Sir Konstantin Novoselov | |
| Konstantin.Novoselov@manchester.ac.uk | |
| +44-161-275-4119 |