Thermal evaporator uses thermal heating to heat up a solid target source in a boat such as tungsten boat to its melting temperature, causing atoms evaporated from the target to coat substrate in the vacuum chamber. The Leybold UNIVEX 300 thermal evaporator has a base pressure of 3×10-6mBar with rotatory rough pump and turbo pump. The evaporator is used mainly for ohmic contact with Au/Ge/Ni alloy. It has 5 boats that can potentially have more materials for evaporation.
ManufacturerOERLIKON LEYBOLD VACUUM